Roughness of slit edge at pixel size scale (0.12 mm) |
Wq = 0.38 +/- 0.07 micron where Wq is the rms of the filtered roughness profile above a 0.12 mm cutoff |
Waviness of slit edge (typical slit length 6-7 mm) |
Wt = 1.3 +/- 0.3 micron where Wt is the maximum peak-to-valley of the profile above a 2.5 mm cutoff |
Slit width | > 80 micron (limited by laser beam diameter 40 micron) |
Slit length | < 20 mm (shavings larger than this size cannot be disposed of by the exhauster |
Positioning accuracy | < 15 micron at the machine (allow for further 15 micron at the focal plane including thermal expansion of mask support) |
Cutting speed | 6 mm/sec for fine cutting (slits) 20 mm/sec for coarse cutting (contours) |
Manufacturing time | from 460 s for one "empty" mask (overhead due to Invar sheet mounting, connection set-up,
cutting of
contour and fixed features
) to 950 s for one mask with 200 slits |